| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, which can obtain a vaporized gas in which a material solution is uniformly dispersed, and to provide a method for vaporizing the material solution. <P>SOLUTION: The vaporizer has: (1) a dispersion part 8 having a gas introducing port 4 for introducing a pressurized carrier gas 3 to a gas passage, means for supplying a material solution 5a to the gas passage, and a gas exit 7 for sending the carrier gas containing the material solution to a vaporization part 22; (2) a vaporization part 22 including a vaporization tube 20 of which one end is connected to a reaction tube of an MOCVD system and the other end is connected to the gas exit 7, and heating means for heating the vaporization tube 20, and for heating and vaporizing the carrier gas containing the material solution sent from the dispersion part 8; and (3) the dispersion part 8 having a main body 1 of the dispersion part having a cylindrical hollow part, a rod 10 having an outer diameter smaller than an inner diameter of the cylindrical hollow part, and a spiral groove 60 on the side of the vaporization part 22 in the outer periphery of the rod 10. The rod 10 is inserted into the cylindrical hollow part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
