发明名称 |
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS |
摘要 |
An apparatus for generating extreme ultraviolet light used with a laser apparatus and connected to an external device so as to supply the extreme ultraviolet light thereto includes a chamber provided with at least one inlet through which a laser beam is introduced into the chamber; a target supply unit provided on the chamber configured to supply a target material to a predetermined region inside the chamber; a discharge pump connected to the chamber; at least one optical element provided inside the chamber; an etching gas introduction unit provided on the chamber through which an etching gas passes; and at least one temperature control mechanism for controlling a temperature of the at least one optical element. |
申请公布号 |
US2012223257(A1) |
申请公布日期 |
2012.09.06 |
申请号 |
US201213474100 |
申请日期 |
2012.05.17 |
申请人 |
NAGAI SHINJI;ABE TAMOTSU;NAGANO HITOSHI;WAKABAYASHI OSAMU;GIGAPHOTON, INC. |
发明人 |
NAGAI SHINJI;ABE TAMOTSU;NAGANO HITOSHI;WAKABAYASHI OSAMU |
分类号 |
G21K5/04 |
主分类号 |
G21K5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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