Method For Fabricating Semiconductor Wafers For The Integration of Silicon Components With Hemts, And Appropriate Semiconductor Layer Arrangement

摘要

The invention describes a method for fabricating silicon semiconductor waferswith the layer structures from III-V semiconductor layers for the integration of HEMTs based on semiconductor III-V layers with silicon components. SOI silicon semiconductor wafersare used, the active semiconductor layer of which has the III-V semiconductor layers (24) of the HEMT design (2) placed on it stretching over two mutually insulated regions (24a, 24b) of the active silicon layer. An appropriate layer arrangement is likewise disclosed.