FLOATING GATE FLASH CELL DEVICE AND METHOD FOR PARTIALLY ETCHING SILICON GATE TO FORM THE SAME

摘要

A method for forming a split gate flash cell memory device provides for establishing a floating gate region then using spacers or other hard mask materials that cover opposed edges of a gate electrode material in the gate region, to serve as hard masks during an etching operation that partially etches the gate electrode material which may be polysilicon. The gate electrode so produced serves as a floating gate electrode and includes a recessed central portion flanked by a pair of opposed upwardly extending fins which may terminate upwardly at an apex. A floating gate oxide is then formed by thermal oxidation and/or oxide deposition techniques.