发明名称 |
Optical components for use in measuring projection lens distortion or focus of an optical imaging system that images a substrate |
摘要 |
New and useful optical components are provided, for use in measuring projection lens characteristics of an optical imaging system that images a substrate. The optical components comprise an array of full NA imagers located at the substrate plane, and a relay system for imaging the imagers to a detector that is remote from the substrate. |
申请公布号 |
US2012224172(A1) |
申请公布日期 |
2012.09.06 |
申请号 |
US201113315592 |
申请日期 |
2011.12.09 |
申请人 |
GOODWIN ERIC PETER;SMITH DANIEL GENE;WILLIAMSON DAVID MICHAEL;SUGAWARA TAKAMITSU;KITAMURA YASUHIRO;NIKON CORPORATION |
发明人 |
GOODWIN ERIC PETER;SMITH DANIEL GENE;WILLIAMSON DAVID MICHAEL;SUGAWARA TAKAMITSU;KITAMURA YASUHIRO |
分类号 |
G01N21/17 |
主分类号 |
G01N21/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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