发明名称 HOLDING JIG
摘要 <P>PROBLEM TO BE SOLVED: To provide a holding jig from which a thin plate-like object adhesively held thereto can be removed with ease. <P>SOLUTION: A holding jig 1 comprises: an adhesive sheet 5 which has an adhesive region 11 including an adhesive portion 14 and a non-adhesive circumference portion 12 surrounding the adhesive region 11; and a substrate 6 which has a void 23 on which the adhesive sheet 5 is placed and into which the adhesive portion 14 is embedded. A formed space 25 which is defined by a thin plate-like object 9 arranged over the adhesive region 11 and the non-adhesive circumference portion 12, and the adhesive portion 14 embedded in the void 23 is an open space. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012169405(A) 申请公布日期 2012.09.06
申请号 JP20110028356 申请日期 2011.02.14
申请人 SHIN ETSU POLYMER CO LTD 发明人 HARUNO HIROSHI;YOKOYAMA HIROAKI
分类号 H01L21/683;H01L21/50 主分类号 H01L21/683
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