| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid control device capable of achieving responsiveness that is similar to the case that a conventional analog control is used even for a valve control mechanism employing a digital control. <P>SOLUTION: A fluid control device 100 comprises: a fluid control valve 2 provided on a flow channel 5 where fluid flows; a fluid measurement part 1 for measuring physical quantities associated with the fluid; and a valve control mechanism 4 for controlling an opening of the fluid control valve 2 so that measurement values of the physical quantities measured in the fluid measurement part becomes predetermined set values. The valve control mechanism 4 includes: an operation amount calculation part 41 for calculating operating amounts of the opening of the fluid control valve 2 by means of a digital control based on deviations between the measurement values and the set values; and a phase compensation part 42 for compensating for phase delay by means of an analog control. <P>COPYRIGHT: (C)2012,JPO&INPIT |
