| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier robot capable of preventing upsizing of a cabinet and a deterioration in cleanliness. <P>SOLUTION: A carrier robot for conveying a substrate mounted on a hand comprises a body having a lifting and lowering mechanism, a first arm rotatable in a horizontal direction on the body, a second arm rotatable in the horizontal direction on the leading end of the first arm, and the hand rotatable in the horizontal direction on the leading end of the second arm. A lifting and lowering shaft of the lifting and lowering mechanism and a first arm rotating shaft as a rotating shaft for the first arm are offset in a plan view; a rotation range of the first arm is semicircular; and the lifting and lowering shaft falls within the rotation range of the first arm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
