| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical scanning element that requires only a simple manufacturing process, permits a reduction in manufacturing cost, and restrains a drop in resolution. <P>SOLUTION: Arm parts 13a and 13b, disposed in the same horizontal position as a light-reflecting planar mirror part 11 and supporting beam parts 12a and 12b, oscillates the mirror part 11 in a first direction by being driven; a frame part 15, having a pair each of wire fixing parts 17a to 17f disposed in different horizontal positions from the mirror part 11, supports the arm parts 13a and 13b; suspension wires 18a to 18f support the frame part 15 in the wire fixing parts 17a to 17f so that the frame part 15 can oscillate in a second direction orthogonal to the first direction; and piezoelectric films 14a to 14d, disposed on the arm parts 13a and 13b, drive, by being displaced, the arm parts 13a and 13b to oscillate the mirror part 11 in the first direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
