| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high quality substrate with piezoelectric film which can suppress in-plane dispersion of a film thickness, and is excellent in piezoelectric characteristics, and a method for manufacturing the substrate with the piezoelectric film and a film forming device. <P>SOLUTION: The substrate 10 with the piezoelectric film includes the substrate 3 having a circular shape in planar view and a diameter of 4 inches or more, a base layer provided on the substrate 3, and the piezoelectric film 1 provided on the base layer and composed by using a piezoelectric material having a niobium oxide-based perovskite structure. The piezoelectric film 1 has a thickness of 0.3 μm or more and 10 μm or less, and the standard deviation of the film thickness of the piezoelectric film 1 in the in-plane piezoelectric film 1 and the mean value of the film thickness satisfy a relational expression: the standard deviation/the mean value≤0.03. <P>COPYRIGHT: (C)2012,JPO&INPIT |
