METHOD OF PREPARING SAMPLE FOR ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a method of preparing a sample for an electron microscope that enables the sample to be highly accurately observed through a scanning electron microscope or a transmission electron microscope by performing cross-section processing using a focused ion beam processing device even when a region to be observed is present inside the sample.

SOLUTION: A sample is imaged by an optical microscope so that a region to be observed which is present inside the sample having transparency and a predetermined object which is present on the surface of the sample appear on the same image. Location information of the region to be observed is calculated based on the obtained microscope image. A minute sample piece including the region to be observed is extracted from the sample using a focused ion beam processing device based on the calculated location information of the region to be observed. Cross-section processing is performed on the extracted minute sample piece by focused ion beam irradiation. Thus the region to be observed is located on the surface of the minute sample piece.

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