| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a package manufacturing method by which a lead electrode narrow in width and thick in thickness can be formed with a good precision, and a durable package having a stable electrical property can be obtained, and to provide a piezoelectric vibrator according to the package manufacturing method, and an oscillator, an electronic device and a radio-controlled timepiece, each having the piezoelectric vibrator. <P>SOLUTION: The package manufacturing method comprises a lead electrode formation step S33 for forming a lead electrode on an upper face U of a wafer 40 used for a base substrate. The lead electrode formation step S33 includes: a mask member setting step S33B for setting a mask member 75 on the upper face U of the wafer 40; a tentatively-drying step S33C for spraying a conductive resin 73 while reciprocating a spray 77 disposed on the side of the upper face U of the wafer 40 along the upper face U, and heating a heater plate 71 to dry the conductive resin 73 deposited to the upper face U; and a calcination step S33D for calcining and hardening the dried conductive resin 73. <P>COPYRIGHT: (C)2012,JPO&INPIT |
