SINTERED BODY, AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sintered body which prevents the deterioration in conductivity and corrosion resistance as time passes under a halogen-based plasma atmosphere, and to provide a method for producing the same.

SOLUTION: The sintered body includes yttrium oxide or a multiple oxide of yttrium and aluminum and fibrous carbon. The fibrous carbon is three-dimensionally dispersed in the grain boundary of the yttrium or the multiple oxide of yttrium and aluminum. The aggregation diameter of the fibrous carbon is not more than 10 μm.

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