发明名称 PRODUCTION METHOD OF CURABLE COMPOSITION FOR IMPRINT
摘要 <P>PROBLEM TO BE SOLVED: To provide a curable composition for imprint which reduces peeling of pattern effectively while ensuring excellent coating properties and temporal stability. <P>SOLUTION: In the production method of a curable composition containing (A) a polymerizable monomer, (B) a polymerization initiator, and (C) a solvent, one kind of liquid (D) containing at least one kind of compound out of a group consisting of the polymerizable monomer (A) and the polymerization initiator (B) is prepared, the liquid (D) is passed through a filter, and then the solvent (C) is added. Alternatively, two kinds or more of liquids (D) containing at least one kind of compound out of a group consisting of the polymerizable monomer (A) and the polymerization initiator (B) are prepared, and respective liquids (D) are passed through a filter and mixed before the solvent (C) is added. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012169462(A) 申请公布日期 2012.09.06
申请号 JP20110029436 申请日期 2011.02.15
申请人 FUJIFILM CORP 发明人 ENOMOTO YUICHIRO;KODAMA KUNIHIKO;TARUYA SHINJI
分类号 H01L21/027;B29C59/02;C08F2/00 主分类号 H01L21/027
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