| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cabinet that optimizes disposition of a built-in apparatus, and a semiconductor manufacturing apparatus. <P>SOLUTION: A cabinet isolates an airflow as a clean downflow, which passes through a filter installed in an upper portion, from the outside. A carrier robot for carrying a substrate mounted on the hand, and an aligner device for detecting the directional property of the substrate and putting it in order are provided inside the cabinet. The carrier robot comprises a body having a lifting and lowering mechanism, a first arm rotatable in a horizontal direction on the body, a second arm rotatable in the horizontal direction on the leading end of the first arm, and a hand rotatable in the horizontal direction on the leading end of the second arm. A side wall of the cabinet is provided with a cassette opener that is mounted with a cassette for housing the substrates in a multi-tier manner. The aligner device is disposed at a height outside the range of the height of the substrate housed in the lowermost tier and the height of the substrate housed in the uppermost tier in the cassette. <P>COPYRIGHT: (C)2012,JPO&INPIT |
