| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a glass fine particle deposit capable of producing a glass fine particle deposit stably, while suppressing adhesion or contamination of a foreign matter. <P>SOLUTION: In this method for producing a glass fine particle deposit, the periphery of a reaction vessel 11 is covered with an outside vessel 12, and a clean air introduction port 39 is provided on the side face on the burner 13 arrangement side in the reaction vessel 11, and a mesh wall part 23 for straightening the flow of clean air CA is provided on the clean air introduction port 39, and a support base 45 for supporting the burner 13 is arranged on the outer part of the outside vessel 12, and the clean air CA is supplied into a space part 20 between the reaction vessel 11 and the outside vessel 12 when depositing glass fine particles on a target 15, and thereby the clean air CA in the space part 20 is sent into the reaction vessel 11 via the mesh wall part 23 from the clean air introduction port 39, and a pressure Ps in the space part 20 is heightened furthermore than a pressure Ph in the reaction vessel 11 and the atmospheric pressure Pt which is a pressure of the outer part of the outside vessel 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
