| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam intensity distribution measurement method which enhances the accuracy of measurable beam resolution. <P>SOLUTION: The beam intensity distribution measurement method of a charged particle beam measures the beam intensity distribution of a charged particle beam by scanning a metal mark, tapered at a certain angle θ from the upper surface toward the lower surface, with a charged particle beam. The metal mark is formed so that the product of the thickness t of the metal mark and the certain angle θ is equal to or smaller than a desired resolution σ of charged particle beam. According to the invention, accuracy of measurable beam resolution can be enhanced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
