| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method capable of accurately and quickly measuring internal stress of a material including a large grain. <P>SOLUTION: A method for measuring internal stress in the invention includes: an exposure step (S1) for exposing an object to be measured to a synchrotron X-ray; a control step (S2) for using a two-dimensional slit to control a gauge volume of diffraction of X-ray transmitted from the object to be measured; a detection step (S3) for using a two-dimensional X-ray detector to detect a diffraction spot in the controlled gauge volume; a step (S4) for repeating steps from the exposure step to the detection step by moving the object to be measured; and an analysis step (S5) for determining a diffraction angle at a position equivalent to a center of the gauge volume based on the detected diffraction spot. In the analysis step, parabolic approximation is applied to a relationship between a position of the diffraction spot and diffraction intensity, and a value of diffraction angle at a position corresponding to the vertex of the parabola is set to the diffraction angle at a position corresponding to the center of the gauge volume. <P>COPYRIGHT: (C)2012,JPO&INPIT |
