| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element being utilized in an ultrasonic motor that can perform driving at multi degrees of freedom, and detecting a vibration state, and having a simple configuration, and to provide an ultrasonic motor having the piezoelectric element. <P>SOLUTION: A piezoelectric element 10 for use in an ultrasonic vibrator driving a driven body by a plurality of vibration modes excited by application of a predetermined driving signal, is configured to have vibration detection electrode layers 3 and 4 including internal electrodes 3d-1, 3d-2, 4d-1, 4d-2, 3d-1', 3d-2', 4d-1', and 4d-2' configuring a vibration detection electrode detecting a vibration component in a propulsion direction at driving of the driven body in a plurality of axial directions among vibrations in the plurality of vibration modes. The vibration detection electrode layers 3 and 4 are provided in the vicinity of an antinode in a flexural vibration mode in directions orthogonal to each other at the same frequency. <P>COPYRIGHT: (C)2012,JPO&INPIT |
