| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing apparatus capable of maintaining polishing precision although fewer expendable parts are periodically replaced. <P>SOLUTION: The polishing apparatus includes: a polishing lap 20 having a polishing surface 20a at the front side thereof to polish an end surface of a workpiece; a support mechanism 30 for supporting a rear surface 20b of the polishing lap 20 while allowing the movement of the polishing lap 20 on a predetermined plane; a workpiece holder 50 for holding the workpiece in a manner that the end surface of the workpiece makes contact with the polishing surface of the polishing lap; and a driving mechanism 70 for linearly reciprocating the polishing lap while rotating the polishing lap 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
