| 摘要 |
PURPOSE: A method of controlling a resonant wavelength in a photonic crystal cavity mode by atomic layer deposition and laser irradiation and an optical device using the same are provided to precisely control the resonant wavelength in the photonic crystal cavity mode by using atomic layer deposition and laser irradiation. CONSTITUTION: A slab having a photonic crystal cavity, in which a plurality of air holes is included at a two-dimensional lattice pattern, is prepared(S10). A dielectric thin film is deposited on the slab using an atomic layer deposition method(S12). A surface of the slab is oxidized in an interface of the dielectric thin film and the slab by irradiating the slab having the dielectric thin film with a laser(S14). An oxide formed on the surface of the slab has a lower refractive index than that of the slab with laser irradiation. [Reference numerals] (S10) Preparing a slab in which a photonic crystal cavity is formed including a plurality of air holes of a two-dimensional lattice pattern; (S12) Deposition of a dielectric thin film on the inner circumferential of the holes which are formed on the upper side and the lower side of the slab using an atomic layer deposition method; (S14) Oxidization of the surface of the slab in an interface of the dielectric thin film and the slab by irradiating the slab having the dielectric thin film with a laser
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