| 摘要 |
<p>A metrological apparatus comprises an optical measurement system (1) such as a coherence scanning interferometer to obtain measurement data representative of a surface of a workpiece and a rotation device (15) to effect relative rotation between the optical measurement system and the workpiece about a measurement axis to enable a plurality of measurement data sets to be obtained with each measurement data set being obtained by the optical measurement system at a respective one of a number of different relative rotational orientations of the optical measurement system and the workpiece. A data corrector (323) is provided to obtain correction data to enable correction of a measurement data set. The correction data may be an average of the plurality of measurement data sets. The measurement data sets may comprise roundness / surface height measurement data. A corresponding method of determining a surface characteristic of a surface of a workpiece is also claimed.</p> |
