| 摘要 |
<p>The structure has a substrate (2) comprising a main extension plane (100), and a conductor element installed between the substrate and a micromechanical functional layer in a direction perpendicular to the extension plane. The conductor element has fixation elements (41, 42) fixed to the substrate. The conductor element has a bridge element (43) connected to the fixation elements at same time. The bridge element has a bridge zone separated from the fixation elements. An independent claim is also included for a method for fabricating a micromechanical structure.</p> |
