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发明名称
METHOD FOR MEASURING LAYER THICKNESS BY MEANS OF LASER TRIANGULATION, AND DEVICE
摘要
申请公布号
KR20120098632(A)
申请公布日期
2012.09.05
申请号
KR20127009905
申请日期
2010.06.21
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
MELZER JOKISCH TORSTEN;OPPERT ANDREAS;THOMAIDIS DIMITRIOS
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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