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发明名称
HIGH-PURITY FLUORINE GAS, THE PRODUCTION AND USE THEREOF, AND A METHOD FOR MONITORING IMPURITIES IN A FLUORINE GAS
摘要
申请公布号
KR20120098683(A)
申请公布日期
2012.09.05
申请号
KR20127012164
申请日期
2010.10.13
申请人
SOLVAY FLUOR GMBH
发明人
PERNICE HOLGER;EICHER JOHANNES;FEYS FRANCIS;BALTHASART DOMINIQUE;SOMMER CHRISTOPH;KRUEGER HARALD
分类号
C01B7/20;G01N21/01
主分类号
C01B7/20
代理机构
代理人
主权项
地址
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