DEVICE FOR REMOVING FLOATING DUST

摘要

PURPOSE: A dust removing device is provided to prevent an electric discharge of an electrostatic-induced dust collection film caused by first and second transferring paths including an insulator. CONSTITUTION: A dust removing device comprises a process chamber(10), a dust collection film(30), an electrostatic induction unit(20), and a film transferring unit. Lateral sides of first and second through-passages(12a,12b) of the process chamber are bored in a slit shape. The dust collection film passes through the process chamber through the first and second through-passages. The electrostatic induction unit is arranged adjacently to the first through-passage and induces static electricity to the dust collection film. The film transferring unit transfers the dust collection film from the first through-passage to a direction of the second through-passage.