发明名称 WORK ADHESIVE CHUCK DEVICE AND WORK ADHESION MACHINE
摘要 PURPOSE: A work adhesive chuck device and a work adhesive are provided to improve peeling characteristics by preventing the flexure generated on a plate work. CONSTITUTION: An adhesive member(1) detachably supports a plate work(W). A peeling member(2) is installed to compulsively peel the plate work from an adhesive side(1a) of the adhesive member. The peeling member includes a leg section(2b) and a mounting convex unit(2c). A ring shaped member(4) is installed to surround the circumference of the peeling member. A support member(3) is installed on the rear of the peeling member.
申请公布号 KR20120098400(A) 申请公布日期 2012.09.05
申请号 KR20110145793 申请日期 2011.12.29
申请人 SHIN-ETSU ENGINEERING CO., LTD. 发明人 OHTANI YOSHIKAZU
分类号 H01L21/683;G02F1/13;G02F1/1339;H01L21/02 主分类号 H01L21/683
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