发明名称 |
WORK ADHESIVE CHUCK DEVICE AND WORK ADHESION MACHINE |
摘要 |
PURPOSE: A work adhesive chuck device and a work adhesive are provided to improve peeling characteristics by preventing the flexure generated on a plate work. CONSTITUTION: An adhesive member(1) detachably supports a plate work(W). A peeling member(2) is installed to compulsively peel the plate work from an adhesive side(1a) of the adhesive member. The peeling member includes a leg section(2b) and a mounting convex unit(2c). A ring shaped member(4) is installed to surround the circumference of the peeling member. A support member(3) is installed on the rear of the peeling member.
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申请公布号 |
KR20120098400(A) |
申请公布日期 |
2012.09.05 |
申请号 |
KR20110145793 |
申请日期 |
2011.12.29 |
申请人 |
SHIN-ETSU ENGINEERING CO., LTD. |
发明人 |
OHTANI YOSHIKAZU |
分类号 |
H01L21/683;G02F1/13;G02F1/1339;H01L21/02 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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