| 摘要 |
<p>PURPOSE: A test system, a management server thereof, a test device thereof, and a test data management method thereof are provided to prevent defective products beforehand by confirming test result data or processing conditions of the defective products according to a test result. CONSTITUTION: A test system(10) includes the followings. Test devices(11a, 11b, 11c) test products produced in a factory. A management server(30) is connected to the test devices through a communication line. One of the test devices includes a device-side test result DB(database)(14a). The device-side test result DB stores test result data. The test result data is data about a result generated by testing a substrate with one of the devices. [Reference numerals] (11a) First test device; (11b) Second test device; (11c) Third test device; (13a-13c) Control unit; (14a-14c) Device-side test result DB; (15a-15c) Device-side program DB; (30) Management server; (31) Control unit; (32) Server-side test result DB; (33) Server-side test program DB; (34) Statistical analysis DB</p> |
