PHOTOMASK CLEANING APPARATUS AND CLEANING METHOD OF PHOTOMASK USING THEREBY

摘要

PURPOSE: An apparatus and method for cleaning a photo mask are provided to prevent damage to a photo mask by removing pellicle adhesive remnants using laser. CONSTITUTION: A photo mask(1) includes a first region(10) and a second region(20). A pattern(15) is formed on the first region. Pellicle adhesive remnants remain in the second region. A laser provider(200) removes the pellicle adhesive remnants by applying laser to the pellicle adhesive remnants.