发明名称 APPARATUS OF ETCHING A GLASS SUBSTRATE
摘要 PURPOSE: A glass substrate etching device is provided to uniformly and efficiently etch the glass substrate by including a rotary part which moves in horizontal direction. CONSTITUTION: A glass substrate etching device comprises a vessel (110), a first plate(120) and a moving part(130). The container accepts etchant. The first plate is arranged within the container. The glass substrate is horizontally settled on the first plate. The moving part is placed inside the container in order to be face the glass substrate. At the top or bottom of the first plate, the etchant is flowed. The moving part horizontally moves the etchant by horizontally moving on the first plate. The moving part comprises the body, horizontal moving wings and a driving part. The wings are attached to the body, and the driving part controls the movement of the body.
申请公布号 KR20120098558(A) 申请公布日期 2012.09.05
申请号 KR20120080130 申请日期 2012.07.23
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 HAN, KWAN YOUNG;LEE, AH RAM
分类号 C03C15/00;H01L21/306;H01L23/15 主分类号 C03C15/00
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