METHOD OF FORMING TITANIUM NITRIDE FILM, APPARATUS FOR FORMING TITANIUM NITRIDE FILM, AND STORAGE MEDIUM STORING PROGRAM

摘要

PURPOSE: A method and an apparatus for forming a titanium nitride film and a recording medium for recording a program are provided to prevent ammonium chloride from being generated as a by-product. CONSTITUTION: A reaction pipe(2) has a cylindrical shape. An exhaust unit(3) for discharging a gas inside the reaction pipe is installed on one side of the reaction pipe. The upper end of the exhaust unit is connected to an exhaust port(4). A lid(5) is installed on the bottom of the reaction pipe. The lid is formed of a material having excellent heat-resistant and corrosion-resistant properties such as quartz. A wafer boat(6) is installed on upper part the lid. [Reference numerals] (100) Controller