发明名称 PROCEDIMENTO DI FABBRICAZIONE DI UN DISPOSITIVO EMETTITORE DI RADIAZIONE OTTICA A CAVITA' RISONANTE
摘要 <p>A method of manufacturing a device for emission of optical radiation integrated on a substrate of a semiconductor material includes the steps of forming a first mirror, a second mirror of a dielectric type, and an active layer comprising a main zone designed to be excited to generate the radiation. First and second electrically conductive layers are formed and arranged to produce a generation electric signal of an electric field to which an excitation current of the main zone is associated. A dielectric region is formed between the first and the second layers by partially oxidizing the first electrically conductive layer to and thereby obtaining a thermal oxide layer, to space out corresponding peripheral portions of the first and second layers so that the electric field present in the main zone is greater than that present between the peripheral portions thus favouring a corresponding generation of the excitation current in the main zone.</p>
申请公布号 IT1395244(B1) 申请公布日期 2012.09.05
申请号 IT2008TO00941 申请日期 2008.12.17
申请人 STMICROELECTRONICS S.R.L. 发明人 CASTAGNA MARIA ELOISA;MUSCARA' ANNA
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