Device and method for measuring the speed or current efficiency when depositing or removing surfaces and process control based on same

摘要

Measuring the speed during the deposition, or during the removal of surfaces, comprises: (a) introducing a rod-shaped sensor in the process of deposition or the removal such that a deposition or removal of material occurs on a part of the sensor; (b) exiting the rod-shaped sensor to perform a longitudinal oscillation; (c) measuring the sensor rod adjusting vibration; (d) regulating the phase angle between the excitation- and receiver vibration by continuous tracking of the excitation frequency at 90[deg] ; and (e) calculating a time course of the mass of the layer present on the sensor part. Measuring the speed during the deposition, or during the removal of surfaces, comprises: (a) introducing a rod-shaped sensor in the process of deposition or the removal such that a deposition or removal of material occurs on a part of the sensor; (b) exiting the rod-shaped sensor to perform a longitudinal oscillation, where the excitation frequency and the sensor geometry are coordinated such that a stationary wave is set in the rod in which the node of vibration at the excitation point and a maximum of the longitudinal displacement at the rod tip are located; (c) measuring the sensor rod adjusting vibration; (d) regulating the phase angle between the excitation- and receiver vibration by continuous tracking of the excitation frequency at 90[deg] so that the sensor rod oscillates at its natural frequency; and (e) calculating a time course of the mass of the layer present on the sensor part in deposition or removal. An independent claim is also included for a device for carrying out the above mentioned method, comprising the sensor in the form of a rod-shaped sensor main body (101) having a sensor head (102) and a sensor tip (105), where an element (103) is provided on the sensor head for producing a piezoelectric or magnetostrictive longitudinal vibration and a transducer (104) is coupled for feedback measurement of the autogenous vibration of the sensor. The sensor tip has a limited surface for layer deposition or layer removal. The rest of the sensor surface is designed such that no separation or no erosion occurs. A coupled control device is provided, which controls the phase angle of 90[deg] between the excitation and receiver vibration by changing the excitation frequency, and by unit for processing information, which calculates a mass change or a speed of material removal or deposition continuously from the course of excitation frequency.