| 摘要 |
PURPOSE: A pre-discharging unit for a substrate coating apparatus is provided to minimize the using amount of a solvent by lowering the hydrophilic characteristic of chemical on a thin film plate. CONSTITUTION: A pre-discharging unit for a substrate coating apparatus is used before chemical is applied on the surface of a substrate(G) to be treated which is fixed to a substrate chuck(10) by a slit nozzle. The pre-discharging unit includes a thin film plate(210). The thin film plate is made of a metal such that the width of the thin film plate is wider than the width of the slit nozzle. A ceramic coating layer is formed on the upper side of the thin film plate. An inorganic ceramic coating layer is formed by applying a coating agent containing the powder of inorganic non-metallic materials. |
