发明名称 SAWING APPARATUS OF SINGLE CYSTRAL THE SAME
摘要 PURPOSE: A single-crystal ingot cutting apparatus is provided to prevent thermal deformation of ingot during cutting by directly supplying slurry to the ingot. CONSTITUTION: A single-crystal ingot cutting apparatus comprises a mounting part(100) in which ingot is placed, a wire saw(200) which is installed underneath the mounting part, and a slurry supply part which is formed in a portion of the mounting part. The slurry supply part comprises an injection unit(520) coupled to a portion of the mounting part and a slurry feed pipe(540) supplying slurry to the injection unit. A slurry curtain is installed inside the injection unit to change the feed path of slurry.
申请公布号 KR20120098084(A) 申请公布日期 2012.09.05
申请号 KR20110017791 申请日期 2011.02.28
申请人 LG SILTRON INCORPORATED 发明人 KIM, JU YOUNG
分类号 B28D5/04;B24B27/06;B28D7/00;H01L21/304 主分类号 B28D5/04
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