CARBON NANOTUBE FORMING METHOD AND PRE-TREATMENT METHOD THEREFOR

摘要

PURPOSE: A method for forming carbon nano-tubes and a method for pre-treating the carbon nano-tubes are provided to suppress the introduction of impurities into carbon nano-tubes and to form carbon nano-tubes which are vertically oriented on the surface of a target. CONSTITUTION: A method for forming carbon nano-tubes includes the following: a catalytic metal layer is formed on the surface of a target; oxygen plasma is applied to the catalytic metal layer at the temperature of T1 to form surface oxidized catalytic metal particles(S1); hydrogen plasma is applied to the catalytic metal particles at the temperature of T2, which is higher than the T1, to activate the surfaces of the catalytic metal particles(S2); and carbon nano-tubes are grown on the catalytic metal particles at the temperature of T3 based on a thermal chemical vapor deposition method(S3). [Reference numerals] (AA) Start; (BB) End; (STEP S1) Oxygen plasma treatment(temperature T1); (STEP S2) Hydrogen plasma treatment(temperature T2); (STEP S3) Carbon nanotube formation(temperature T3)