PROBE SYSTEM AND METHOD OF CLEANING DEVICE UNDER TEST

摘要

PURPOSE: A probe apparatus and a cleaning method for an inspected object are provided to accurately connect to an electrode by eliminating foreign substances in the center of the inspected object. CONSTITUTION: A main body(42) of a probe apparatus connects to electrodes by including a plurality of probes. The plurality of the probes includes a needle line which faces to a down direction. A cleaning apparatus(44) is formed a front unit under the front side of the needle line. A combination apparatus(46) relatively moves the cleaning apparatus and the probe apparatus.