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发明名称
Micro-structure measurement device using diffraction of laser
摘要
申请公布号
KR101180247(B1)
申请公布日期
2012.09.05
申请号
KR20100020225
申请日期
2010.03.08
申请人
发明人
分类号
G01N21/47;G01B11/00;G01N23/20
主分类号
G01N21/47
代理机构
代理人
主权项
地址
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