MODULE FOR MODULARLY CONSTRUCTED CLEAN-ROOM FACILITIES,申请号EP20090765024-传众专利搜索

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发明名称	MODULE FOR MODULARLY CONSTRUCTED CLEAN-ROOM FACILITIES
摘要
申请公布号	EP2494591(A1)	申请公布日期	2012.09.05
申请号	EP20090765024	申请日期	2009.11.27
申请人	HUEGLER, KLAUS	发明人	ASYS AUTOMATIC SYSTEMS GMBH & CO. KG
分类号	H01L21/67	主分类号	H01L21/67
代理机构		代理人
主权项
地址

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