| 摘要 |
The acceleration sensor (500) has a seismic measurement device (501) movably arranged on a substrate (505) i.e. silicon substrate, lying in a paper plane. The measurement device is connected with the substrate using a bar spring (502). Two substrate fingers (503, 504) are moved in a z-direction and are connected with the substrate. One of the substrate fingers has two conductive electrodes, which are electrically insulated from each other. The conductive electrodes are separated by an insulation layer or a gap. An independent claim is also included for a method for producing an acceleration sensor. |
