CERAMIC SUBSTRATE FOR PROBE CARD AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A ceramic substrate for a probe card and a manufacturing method thereof are provided to obtain connection of an electrode pad and a via electrode by forming the electrode pad on the via electrode which is exposed to one side of the ceramic substrate. CONSTITUTION: A ceramic substrate(10) with a plurality of via electrodes(11) is prepared. An electrode pad(20), which is electrically connected to a via electrode exposed to one side of the ceramic substrate, is formed. A polymer layer(30) is formed on one side of the ceramic substrate in order to surround the electrode pad. The polymer layer is ground. A plurality of outer layer pads, which is electrically connected to the electrode pad, is formed on the polymer layer.