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经营范围
发明名称
SHOWERHEAD DESIGN WITH PRECURSOR SOURCE
摘要
申请公布号
KR101180214(B1)
申请公布日期
2012.09.05
申请号
KR20107011508
申请日期
2008.10.08
申请人
发明人
分类号
H01L21/20;H01L21/36
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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