| 摘要 |
A nonvolatile semiconductor memory device includes: a substrate; a plurality of gate electrodes provided on the substrate, extended in a first direction parallel to an upper surface of the substrate, arranged in a matrix in an up-to-down direction perpendicular to the upper surface and a second direction, and having a through-hole respectively extended in the up-to-down direction, the second direction being orthogonal to both the first direction and the up-to-down direction; an insulation plate provided between the gate electrodes in the second direction and extended in the first direction and the up-to-down direction; a block insulation film provided on an interior surface of the through-hole and on an upper surface and a lower surface of the gate electrodes and being contact with the insulation plate; a charge storage film provided on the block insulation film; a tunnel insulation film provided on the charge storage film; and a semiconductor pillar provided in the through-hole and extended in the up-to-down direction.
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