发明名称 Device for depositing a layer of polycrystalline silicon on a support
摘要 The present invention relates to a device (100) for depositing a layer based on polycrystalline silicon onto a substantially plane, elongate, moving support (4) having two longitudinal faces (43, 44) and two longitudinal side edges (41, 42), the device comprising: a crucible (1) containing a bath (2) of molten silicon, said support (4) being designed to be dipped at least in part in the bath and to pass substantially vertically in its long direction through the equilibrium surface (21) of the bath; and at least one edge control element (5, 5′), each edge control element being maintained substantially vertically close to one of the two longitudinal side edges (41, 42); each edge control element comprising walls (51 to 53′) defining a longitudinal slot (54, 54′) beside the corresponding longitudinal side edge, each slot being dipped in part in the bath (2) so as to raise the level of the bath by capillarity in the vicinity of the corresponding longitudinal side edge, the device being characterized in that at least one of the walls (51 to 52′), referred to as an “insertion” wall, facing part of one of the longitudinal faces, is substantially plane.
申请公布号 US8256373(B2) 申请公布日期 2012.09.04
申请号 US20040584698 申请日期 2004.12.10
申请人 BELOUET CHRISTIAN;REMY CLAUDE;SOLARFORCE 发明人 BELOUET CHRISTIAN;REMY CLAUDE
分类号 B05C3/12;C23C2/00;C23C2/40;C30B15/00;C30B28/10 主分类号 B05C3/12
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