PROCESS FOR PRODUCING OXIDE THIN FILM AND PRODUCTION APPARATUS THEREFOR,申请号KR20067003747-传众专利搜索

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发明名称	PROCESS FOR PRODUCING OXIDE THIN FILM AND PRODUCTION APPARATUS THEREFOR
摘要
申请公布号	KR101179098(B1)	申请公布日期	2012.09.03
申请号	KR20067003747	申请日期	2004.08.25
申请人		发明人
分类号	H01L21/205;C23C16/40;C23C16/448;C23C16/452;H01L21/316	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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