发明名称 |
APPARATUS FOR REGULATING OPTICAL PATH OF INTERFERENCE SYSTEM AND OPTICAL PATH REGULATION METHOD USING THE SAME |
摘要 |
PURPOSE: An optical path control device at the interference meter and an optical path control method using the same are provided to control an optical path by controlling an interference lens of a linnik structure. CONSTITUTION: A reference lens(110) guides light divided through a beam splitter(101) to a vertical direction. A relative lens(120) guides the light divided through the beam splitter to a horizontal direction. A guide unit(123) is inserted into a first horizontal position fixing unit(121) and slides the relative lens to the horizontal direction. A first horizontal position control unit(127) controls the location of the relative lens by controlling the location of the guide unit. A second horizontal position control unit(130) is fixed which can move to a third predetermined distance(130-1) based on an end portion of the relative lens through a second horizontal position fixing unit(133). [Reference numerals] (150) Camera unit; (AA) Signal processing unit; (BB) Light source
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申请公布号 |
KR20120097207(A) |
申请公布日期 |
2012.09.03 |
申请号 |
KR20110016640 |
申请日期 |
2011.02.24 |
申请人 |
NANO SYSTEM CO., LTD. |
发明人 |
LEE, HYUNG SEOK;KIM, HO HWAN |
分类号 |
G02B26/08;G01B11/24;G01N27/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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