TEMPERATURE CONTROLLER WITH REFRIGERANT FOR FABRICATION OF SEMICONDUCTOR

摘要

PURPOSE: A temperature control apparatus with a refrigerant for manufacturing a semiconductor is provided to reduce time to supply temperature-controlled brine to a semiconductor manufacturing facility by installing a refrigerating unit controlling the temperature of brine to be contiguous to the same layer of the semiconductor manufacturing facility. CONSTITUTION: A refrigerating unit(200) is installed to be contiguous to an upper layer. The refrigerating unit comprises a refrigerant type compressor(230), a condenser(240), an EXV(Electronic Expansion Valve)(220), and a heat exchanger(210). A brine unit(300) is connected to the refrigerating unit while being arranged on a lower layer. The brine unit is composed of a brine tank(310) storing brine and a brine pump(320) transferring the brine. The brine unit controls the temperature of the brine using only a refrigerant.