| 摘要 |
PURPOSE: A substrate inspecting device is provided to prevent the generation of a detective substrate by founding defects of a substrate by at high probability, thereby enhancing a manufacturing yield. CONSTITUTION: A substrate inspecting device comprises a supporting frame, a substrate transferring unit, an inspecting camera, and a lighting unit. The substrate transferring unit is installed in the upper side of the supporting frame and transfers the substrate. The inspecting camera is installed toward the substrate, thereby photographing an inspection surface of the substrate. The lighting unit provides inspecting lights to the inspection surface toward an oblique direction.
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