METHOD OF FORMING THIN FILM HAVING MIXED STRUCTURE

摘要

PURPOSE: A method for forming a thin film having a composite structure is provided to more simply control the crystallinity of a thin film by alternately laminating one or more crystal layers and one or more amorphous layers. CONSTITUTION: A method for forming a thin film having a composite structure comprises the steps of: drawing in reactive gas between a substrate(130) and a cylindrical rotary electrode(140), creating plasma between the substrate and the rotary electrode to induce chemical reaction of the reactive gas, and rotating the rotary electrode and moving the substrate relative to the rotary electrode so that one or more crystal layers and one or more amorphous layers are alternately laminated on the substrate.