CMP PAD CONDITIONER AND ITS MANUFACTURING METHOD,申请号KR20100073779-传众专利搜索

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发明名称	CMP PAD CONDITIONER AND ITS MANUFACTURING METHOD
摘要
申请公布号	KR101178849(B1)	申请公布日期	2012.08.31
申请号	KR20100073779	申请日期	2010.07.30
申请人		发明人
分类号	B24D7/06;B24B53/12;B24D18/00;H01L21/304	主分类号	B24D7/06
代理机构		代理人
主权项
地址

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